Facile metal transfer method for fabricating unconventional metamaterial devices

Mei Zhu and Chengkuo Lee

Abstract

We report a facile metal transfer method to create metal patterns on polydimethylsiloxane (PDMS) surface. The metals were first patterned on polyethylene terephthalate (PET) substrate, and then transferred to PDMS simply by oxygen plasma treatment. The transfer was enabled by weakened metal-PET adhesion due to undercut and charge repulsion. In this way, we got rid of adhesion layers and sacrificial layers that were required by conventional methods. Ours is a fast and convenient method as it takes place at room temperature with just a gentle contact of PET and PDMS. The resolution of this method was found to be in sub-micron range and the morphologies of different transferred patterns were characterized. With such a method, we successfully fabricated some unconventional metamaterial devices, including a double-sided broadband THz filter with a stop band bandwidth of 1.4 THz, and devices on paper, fabric, leaf and nonplanar surfaces. 

This study was performed using TeraView's Spectra 3000 system. (TeraView, Cambridge, UK)

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