The EOTPR 4000 system is configured with an automated probe station which is capable of placing the probe tip to +/- 5 μm precision, while maintaining the EOTPR’s world leading sub-5 μm fault isolation accuracy.
This combination allows users to directly probe TSV tips and copper pillars.
Key Features
- Pre-scan station to map contact location and height.
- Data acquisition time of less than 5 seconds per pin.
- Software that will drive the automated probe station and pre-scan station.
- Availability of both manual mode and automated mode for probing.
- User interface software to manage data display and recipe creation.
- Probe tip placement.
for more information see https://teraview.com/eotpr/#tab|1
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