Abstract
Micro-pyramid shaped subwavelength structures (SWSs) were integrated on
both sides of a terahertz (THz) filter by means of stamping methods. Two
silicon-based stamping molds fabricated via crystallographic wet etching
were utilized to replicate SWSs onto cyclo-olefin copolymer (COC) films
coated onto both sides of a THz filter at the same time. The SWSs act
as an broadband antireflection coating to reduce the surfacereflection loss
in a frequency range of 0.2 THz to 1.4 THz. Compared to a THz filter
without SWSs, the filter integrated with double-sided SWSs exhibits a
low standing wave ratio inside the substrate and THz signal transmission
enhancement of up to 10.8%.
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