Yu-Sheng Lin and Chengkuo Lee
We present a mirrorlike T-shape (MTM) with out-of-plane movable microstructures for enabling active tuning of resonant frequency in the terahertz (THz) region. The resonant frequency of MTM can be actively by using either force or liquid force. First, by gradually increasing the bias, the cantilevers were continuously deformed towards the substrate and then completely snapped down when the bias reached the critical pull-in voltage (12 V). The tuning range is 0.50 THz as compared to the without driving voltage to that operated at the pull-in voltage. Meanwhile, we dropped different liquids on the snap-down surface. In the case of covered with deionised water, the resonant frequency shift of 0.17 and 0.21 THz were measured for inductive-capacitive and dipolar resonances, respectively. Furthermore, we also demonstrate the flow tuning capability of MTM integrated with a fluidic channel by using different injection flow rate from 0 to 5 ml/min. The tunability of MTM is 0.30 THz due to the different bending states of the MTM cantilevers under different liquid forces.
This study was performed using TeraView's TPS spectra 3000 system. (TeraView, Cambridge, UK)