Electrothermally actuated microelectromechanical systems based omega-ring terahertz metamaterial with polarization dependent characteristics

Chong Pei Ho, Prakash Pitchappa, Yu-Sheng Lin, Chia-Yi Huang, Piotr Kropelnicki and Chengkuo Lee

Abstract

We present the design, simulation, fabrication, and characterization of a continuously tunable Omega-ring terahertz metamaterial. The tunability of metamaterial is obtained by integratingmicroactuators into the metamaterial unit cell. Electrothermal actuation mechanism is used to provide higher tuning range, larger stroke, and enhanced repeatability. The maximum achieved tuning range for the resonant frequency is around 0.30 THz for the input power of 500 mW. This shows the potential of using electrothermally actuated microactuators based tunablemetamaterial design for application such as filters, absorbers, sensors, and spectral imagers.

This study was performed using TeraView's TPS spectra 3000 system. (TeraView, Cambridge, UK)

Full Article: http://scitation.aip.org/content/aip/journal/apl/104/16/10.1063/1.4871999