Polarization-sensitive microelectromechanical systems based tunable terahertz metamaterials using three dimensional electric split-ring resonator arrays

Appl. Phys. Lett. 102, 161912 (2013);
http://dx.doi.org/10.1063/1.4803048
+AIP Publishing 2013

Authors: Fusheng Ma¹, You Qian¹, Yu-Sheng Lin¹, Hongwei Liu², Xinhai Zhang², Zhen Liu¹, Julius Ming-Lin Tsai^1,2 and Chengkuo Lee¹
1 Department of Electrical and Computer Engineering, +National University of Singapore, Singapore 
2 Institute of Materials Research and Engineering, A*STAR, Singapore 
3 Institute of Microelectronics, Agency for Science, Technology and Research (A*STAR), Singapore 

Abstract

We present the design, simulation, fabrication, and characterization of structurally reconfigurable metamaterials showing terahertz frequency tunability with a polarization-sensitivity. The proposed metamaterial structures employ deformable microelectromechanical system based curved cantilevers for tuning the resonance frequency of the electric split-ring resonators. The resonance frequency is observed to be either tunable or non-tunable with the electric field of the incident wave, which is perpendicular or parallel to the split gap of the electric split-ring resonators. This polarization-sensitive characteristic has been demonstrated by both the electromagnetic simulation and the experimental measurement. The observed polarization-sensitive tunability could be used for the development of polarization sensitive and insensitive THz polarimetric devices.

... is the scanning electron microscope (SEM) image of one unit cell of the eSRR array confirming that the cantilever beams are released. The eSRR metamaterials were characterized by terahertz time domain spectroscopy (THz-TDS, TeraView TPS 3000) in transmission mode...